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MEMS Accelerometer

Inertial SensorMEMS Accelerometer● Active
MASS
0.05 kg
POWER
0.5 W
REDUNDANCY
Easily replicated due to small size
RAD HARDENED
Varies by model
FIRST USE
Jan 2000

MEMS Accelerometer is a inertial sensor system manufactured by Analog Devices / Honeywell / Various. It features easily replicated due to small size redundancy.

ABOUT MEMS ACCELEROMETER

Micro-Electro-Mechanical Systems accelerometers measure linear acceleration using microscale silicon structures. They are used in small satellite IMUs, sounding rockets, and as supplementary sensors on larger vehicles. Their small size and low cost enable dense sensor arrays for improved fault tolerance.

OPERATING PRINCIPLE

Micromachined silicon proof mass on flexures; capacitive or piezoresistive detection of displacement under acceleration

VEHICLES USING THIS SYSTEM
CubeSatsSounding rocketsSmallSatsVarious
SPECIFICATIONS
CATEGORYInertial Sensor
TYPEMEMS Accelerometer
MANUFACTURERAnalog Devices / Honeywell / Various
MASS0.05 kg
POWER CONSUMPTION0.5 W
REDUNDANCYEasily replicated due to small size
RADIATION HARDENEDVaries by model
ACCURACY1 mg bias stability
FIRST USEJanuary 1, 2000
STATUSActive
DETAILED SPECS
TYPECapacitive MEMS
RANGEu00b150 g
BANDWIDTH_HZ1000
PACKAGE_MM5 x 5 x 2

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